We have investigated a palladium-hydrogen complex in silicon by electron spin resonance (ESR) measurement. A new ESR spectrum was detected in a sample diffused with palladium and hydrogen. The hyperfine structure of hydrogen atoms in the ESR spectrum shows that the spectrum originates from a palladium-hydrogen complex containing three hydrogen atoms (Pd-H3). The anisotropic g-value of Pd-H3 shows that the Pd-H3 complex has an anisotropic character of orthorhombic (C2v) symmetry. The calculated g-values of the Pd-H3 complex are g1 = 2:12, g2 = 2:10, and g3 = 2:03, and the g2 axis is along the (100) direction. The anisotropic character of orthorhombic (C2v ) symmetry results from a configuration consisting of one Pd atom at a substitutional site, two equivalent hydrogen atoms at interstitial sites along the (111) direction, and one hydrogen atom at the next-nearest-neighbor interstitial site along the h100i-twofold symmetry axis. We have also studied the dissociation of a platinum-hydrogen complex by thermal treatment. The activation energy for the dissociation of the Pd-H3 complex is estimated to be about 1.6 eV.
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy