Performance of hydrothermal PZT film on high intensity operation

Minoru Kuribayashi Kurosawa; Hidehiko Yasui; Takefumi Kanda; Toshiro Higuchi

Performance of hydrothermal PZT film on high intensity operation

Minoru Kuribayashi Kurosawa, Hidehiko Yasui, Takefumi Kanda, Toshiro Higuchi

Research output: Contribution to conference › Paper › peer-review

Abstract

A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.

Original language	English
Pages	56-61
Number of pages	6
Publication status	Published - 2000
Externally published	Yes
Event	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn Duration: Jan 23 2000 → Jan 27 2000

Conference

Conference	13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
City	Miyazaki, Jpn
Period	1/23/00 → 1/27/00

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "Performance of hydrothermal PZT film on high intensity operation",

abstract = "A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.",

author = "Kurosawa, {Minoru Kuribayashi} and Hidehiko Yasui and Takefumi Kanda and Toshiro Higuchi",

note = "Funding Information: This work was supported by a grant-in-aid for general scientific research from the Ministry of Education, Science, Sports and Culture of Japan, and by the Proposal-Based New Industry Creative Type Technology R&D Promotion Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and by a grant-in-aid for Research Fellowship for Young Scientists of the Japan Society for the Promotion of Science. ; 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) ; Conference date: 23-01-2000 Through 27-01-2000",

year = "2000",

language = "English",

pages = "56--61",

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TY - CONF

T1 - Performance of hydrothermal PZT film on high intensity operation

AU - Kurosawa, Minoru Kuribayashi

AU - Yasui, Hidehiko

AU - Kanda, Takefumi

AU - Higuchi, Toshiro

N1 - Funding Information: This work was supported by a grant-in-aid for general scientific research from the Ministry of Education, Science, Sports and Culture of Japan, and by the Proposal-Based New Industry Creative Type Technology R&D Promotion Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and by a grant-in-aid for Research Fellowship for Young Scientists of the Japan Society for the Promotion of Science.

PY - 2000

Y1 - 2000

N2 - A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.

AB - A lot of processes about PZT thin film were reported, but there performances at high intensity operation have not been reported yet at all. Hydrothermally deposited PZT film transducers were examined on large vibration amplitude level at resonance frequency. It was demonstrated that the hydrothermal PZT film has superior performance on linearity and maximum vibration velocity. The linearity of frequency responses around the resonance were excellent and superior than bulk material up to high intensity operation. The maximum vibration velocity of a flexural transducer was 1.3 m/sec. Concerning a longitudinal transducer, two deposition processes were tried. The maximum vibration velocity was 0.53 m/sec and 0.9 m/sec. These value were almost two time larger than bulk PZT materials for high power applications.

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M3 - Paper

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SP - 56

EP - 61

T2 - 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)

Y2 - 23 January 2000 through 27 January 2000

ER -

Performance of hydrothermal PZT film on high intensity operation

Abstract

Conference

ASJC Scopus subject areas

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