Petri net solver for semiconductor manufacturing plan

Ryota Maeno, Masami Konishi, Jun Imai

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


Petri net model is a widely used versatile tool which can represent a discrete event system such as a mechanical system, a communication system, and a production system. The merit of this model is easiness in handling. Other merit of the model is descriptive easiness in parallel and synchronous operations. In addition, it is applicable to a wide variety of discrete event system due to its excellence in the analytical ability and the handling ability. However when the size of the targeted model becomes large, the calculation time to solve the optimization problem is remarkably increased. In this paper, application of Petri net solver by decomposition to the Semiconductor Manufacturing is presented. Numerical results showed the practicability of the proposed method.

Original languageEnglish
Pages (from-to)3193-3206
Number of pages14
JournalInternational Journal of Innovative Computing, Information and Control
Issue number12
Publication statusPublished - Dec 1 2008


  • Optimization
  • Petri net model
  • Production planning
  • Route planning
  • Semiconductor manufacturing

ASJC Scopus subject areas

  • Software
  • Theoretical Computer Science
  • Information Systems
  • Computational Theory and Mathematics


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