TY - GEN
T1 - Photopolymerization and metalization for fabricating functional devices and metamaterials
AU - Kawata, Satoshi
AU - Tanaka, Takuo
AU - Takeyasu, Nobuyuki
AU - Nakanishi, Sana
PY - 2006/1/1
Y1 - 2006/1/1
N2 - Two-photon-induced photopolymerization is useful for fabricating 3D micro/nano-structures with the resolution of the sub-diffraction limit. By using this method, photonic crystal was created with pre-compensation of shrinkage of photopolymer. On the contrary, the shrinkage was utilized to reduce the structure size. A micro-lens array was used to produce a mass of structures in parallel. Furthermore, metallization of the 3D polymer templates was conducted by electroless metal plating. These fabrication techniques are applicable to functional micro/nano devices.
AB - Two-photon-induced photopolymerization is useful for fabricating 3D micro/nano-structures with the resolution of the sub-diffraction limit. By using this method, photonic crystal was created with pre-compensation of shrinkage of photopolymer. On the contrary, the shrinkage was utilized to reduce the structure size. A micro-lens array was used to produce a mass of structures in parallel. Furthermore, metallization of the 3D polymer templates was conducted by electroless metal plating. These fabrication techniques are applicable to functional micro/nano devices.
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U2 - 10.1557/proc-0921-t02-01
DO - 10.1557/proc-0921-t02-01
M3 - Conference contribution
AN - SCOPUS:33947691167
SN - 1558998780
SN - 9781558998780
T3 - Materials Research Society Symposium Proceedings
SP - 14
EP - 25
BT - Nanomanufacturing
PB - Materials Research Society
T2 - 2006 MRS Spring Meeting
Y2 - 17 April 2006 through 21 April 2006
ER -