Precision removal of ITO film by LD-pumped SHG YAG laser

Translated title of the contribution: Precision removal of ITO film by LD-pumped SHG YAG laser

Yasuhiro Okamoto, Yoshiyuki Uno, Yasuyuki Hirao

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

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Engineering & Materials Science