Preparation of TaO2 thin films using NbO2 template layers by a pulsed laser deposition technique

Y. Muraoka, Y. Fujimoto, M. Kameoka, Y. Matsuura, M. Sunagawa, Kensei Terashima, T. Wakita, T. Yokoya

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


TaO2 thin films were prepared using rutile-type NbO2 template layers on Al2O3(0001) substrates by a pulsed laser deposition technique. The structural and electronic properties of the films were characterized by performing four-circle X-ray diffraction (XRD) and X-ray photoemission spectroscopy (XPS) measurements. Four-circle XRD measurements revealed the formation and epitaxial growth of (100)-oriented tetragonal TaO2 on the NbO2 template layers. On the other hand, XPS measurements showed two kinds of valence states, namely Ta4 + and Ta5 + in the surface region of the film. The results from the XRD and XPS measurements suggest that the film is composed of epitaxially grown TaO2 with an amorphous Ta2O5 surface layer. It is found from control experiments that the NbO2 template layers play an important role in inducing the crystallization of the TaO2 films and promoting the formation of Ta4 + in the films deposited thereon. The results indicate the effectiveness of the NbO2 template layers for the formation of TaO2 thin films. Our work presents a promising method for the preparation of TaO2 thin films and provides a starting point for further research on TaO2.

Original languageEnglish
Pages (from-to)125-132
Number of pages8
JournalThin Solid Films
Publication statusPublished - Jan 29 2016


  • Epitaxy
  • Niobium dioxide
  • Pulsed laser deposition
  • Tantalum dioxide
  • Template layer
  • Thin film
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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