Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system

A. Tsukamoto; K. Saitoh; K. Yokosawa; D. Suzuki; Y. Seki; A. Kandori; K. Tsukada

doi:10.1109/TASC.2005.849741

Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system

A. Tsukamoto, K. Saitoh, K. Yokosawa, D. Suzuki, Y. Seki, A. Kandori, K. Tsukada

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

Original language	English
Pages (from-to)	177-180
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	15
Issue number	2 PART I
DOIs	https://doi.org/10.1109/TASC.2005.849741
Publication status	Published - Jun 2005

Keywords

Fabrication throughput
HTS SQUID
Magneto-cardiogram
PLD

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TASC.2005.849741

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title = "Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system",

abstract = "We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.",

keywords = "Fabrication throughput, HTS SQUID, Magneto-cardiogram, PLD",

author = "A. Tsukamoto and K. Saitoh and K. Yokosawa and D. Suzuki and Y. Seki and A. Kandori and K. Tsukada",

note = "Funding Information: Manuscript received October 4, 2004. This work was done under a support program for technological development with the aim of achieving practical usage made available by Japans Ministry of Economy, Trade, and Industry and the New Energy and Industrial Technology Development Organization (NEDO).",

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AU - Tsukamoto, A.

AU - Saitoh, K.

AU - Yokosawa, K.

AU - Suzuki, D.

AU - Seki, Y.

AU - Kandori, A.

AU - Tsukada, K.

N1 - Funding Information: Manuscript received October 4, 2004. This work was done under a support program for technological development with the aim of achieving practical usage made available by Japans Ministry of Economy, Trade, and Industry and the New Energy and Industrial Technology Development Organization (NEDO).

PY - 2005/6

Y1 - 2005/6

N2 - We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

AB - We have constructed a high throughput HTS SQUID fabrication process to develop a 51-channel HTS MCG system. To increase the process throughput of the YBCO deposition, we designed and developed a new deposition system based on a pulsed laser deposition technique. In this deposition system, nine YBCO thin films could be deposited in one deposition sequence by successively depositing the YBCO thin films one by one. In addition to the improvement of the fabrication throughput, the magnetometer pattern was designed to improve the yield of the SQUID fabrication. In our magnetometer design, four SQUIDs were connected with one pickup coil. The yield of good magnetometer chips could be increased by selecting the best SQUID among the four. Using the developed SQUID fabrication process, about one hundred magnetometers were fabricated in a month. The 51-channel HTS MCG system was successfully developed and used for clinical testing.

KW - Fabrication throughput

KW - HTS SQUID

KW - Magneto-cardiogram

KW - PLD

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Process of fabricating YBCO SQUIDs for 51-channel HTS MCG system

Abstract

Keywords

ASJC Scopus subject areas

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