Progress in understanding of laser-produced plasmas for EUV source

N. Miyanaga; K. Fujima; S. Fujioka; Y. Fujimoto; H. Fujita; H. Furukawa; K. Hashimoto; T. Hibino; T. Kagawa; T. Kato; T. Kawamura; F. Koike; R. Matsui; R. More; M. Murakami; K. Nagai; M. Nakai; M. Nakatsuka; T. Nishikawa; K. Nishihara; H. Nishimura; T. Norimatsu; T. Okuno; A. Sasaki; K. Shigemori; Y. Shimada; F. L. Sohnatzadeh; A. Sunahara; H. Tanuma; Y. Tao; K. Tsubakimoto; S. Uchida; M. Yamaura; H. Yoshida; V. Zhakhovskii; Y. Izawa

Progress in understanding of laser-produced plasmas for EUV source

N. Miyanaga, K. Fujima, S. Fujioka, Y. Fujimoto, H. Fujita, H. Furukawa, K. Hashimoto, T. Hibino, T. Kagawa, T. Kato, T. Kawamura, F. Koike, R. Matsui, R. More, M. Murakami, K. Nagai, M. Nakai, M. Nakatsuka, T. Nishikawa, K. NishiharaH. Nishimura, T. Norimatsu, T. Okuno, A. Sasaki, K. Shigemori, Y. Shimada, F. L. Sohnatzadeh, A. Sunahara, H. Tanuma, Y. Tao, K. Tsubakimoto, S. Uchida, M. Yamaura, H. Yoshida, V. Zhakhovskii, Y. Izawa

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	297-298
Number of pages	2
Journal	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	1
Publication status	Published - 2003
Event	2003 IEEE LEOS Annual Meeting Conference Proceedings - TUCSON, AZ, United States Duration: Oct 26 2003 → Oct 30 2003

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

Miyanaga, N., Fujima, K., Fujioka, S., Fujimoto, Y., Fujita, H., Furukawa, H., Hashimoto, K., Hibino, T., Kagawa, T., Kato, T., Kawamura, T., Koike, F., Matsui, R., More, R., Murakami, M., Nagai, K., Nakai, M., Nakatsuka, M., Nishikawa, T., ... Izawa, Y. (2003). Progress in understanding of laser-produced plasmas for EUV source. Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 1, 297-298.

Miyanaga, N, Fujima, K, Fujioka, S, Fujimoto, Y, Fujita, H, Furukawa, H, Hashimoto, K, Hibino, T, Kagawa, T, Kato, T, Kawamura, T, Koike, F, Matsui, R, More, R, Murakami, M, Nagai, K, Nakai, M, Nakatsuka, M, Nishikawa, T, Nishihara, K, Nishimura, H, Norimatsu, T, Okuno, T, Sasaki, A, Shigemori, K, Shimada, Y, Sohnatzadeh, FL, Sunahara, A, Tanuma, H, Tao, Y, Tsubakimoto, K, Uchida, S, Yamaura, M, Yoshida, H, Zhakhovskii, V & Izawa, Y 2003, 'Progress in understanding of laser-produced plasmas for EUV source', Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1, pp. 297-298.

@article{5921cce8fade4e46b16fdbd34a6c0858,

title = "Progress in understanding of laser-produced plasmas for EUV source",

author = "N. Miyanaga and K. Fujima and S. Fujioka and Y. Fujimoto and H. Fujita and H. Furukawa and K. Hashimoto and T. Hibino and T. Kagawa and T. Kato and T. Kawamura and F. Koike and R. Matsui and R. More and M. Murakami and K. Nagai and M. Nakai and M. Nakatsuka and T. Nishikawa and K. Nishihara and H. Nishimura and T. Norimatsu and T. Okuno and A. Sasaki and K. Shigemori and Y. Shimada and Sohnatzadeh, {F. L.} and A. Sunahara and H. Tanuma and Y. Tao and K. Tsubakimoto and S. Uchida and M. Yamaura and H. Yoshida and V. Zhakhovskii and Y. Izawa",

year = "2003",

language = "English",

volume = "1",

pages = "297--298",

journal = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

issn = "1092-8081",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2003 IEEE LEOS Annual Meeting Conference Proceedings ; Conference date: 26-10-2003 Through 30-10-2003",

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TY - JOUR

T1 - Progress in understanding of laser-produced plasmas for EUV source

AU - Miyanaga, N.

AU - Fujima, K.

AU - Fujioka, S.

AU - Fujimoto, Y.

AU - Fujita, H.

AU - Furukawa, H.

AU - Hashimoto, K.

AU - Hibino, T.

AU - Kagawa, T.

AU - Kato, T.

AU - Kawamura, T.

AU - Koike, F.

AU - Matsui, R.

AU - More, R.

AU - Murakami, M.

AU - Nagai, K.

AU - Nakai, M.

AU - Nakatsuka, M.

AU - Nishikawa, T.

AU - Nishihara, K.

AU - Nishimura, H.

AU - Norimatsu, T.

AU - Okuno, T.

AU - Sasaki, A.

AU - Shigemori, K.

AU - Shimada, Y.

AU - Sohnatzadeh, F. L.

AU - Sunahara, A.

AU - Tanuma, H.

AU - Tao, Y.

AU - Tsubakimoto, K.

AU - Uchida, S.

AU - Yamaura, M.

AU - Yoshida, H.

AU - Zhakhovskii, V.

AU - Izawa, Y.

PY - 2003

Y1 - 2003

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M3 - Conference article

AN - SCOPUS:0344897072

SN - 1092-8081

VL - 1

SP - 297

EP - 298

JO - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

JF - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

T2 - 2003 IEEE LEOS Annual Meeting Conference Proceedings

Y2 - 26 October 2003 through 30 October 2003

ER -

Progress in understanding of laser-produced plasmas for EUV source

ASJC Scopus subject areas

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