Abstract
We have fabricated a probe sensor. This sensor is for high-precision coordinate measuring machines, surface roughness measuring tools, or scanning probe microscopes (SPM). This sensor consists of a rod vibrating in the axial direction. The longitudinal vibration was excited and also detected by PZT thin film. The PZT thin film was fabricated by a hydrothermal method. The hydrothermal method uses the reaction process in hot and high pressure aqueous solutions. We made 27.8 mm long sensor. Its resonance frequency was 116 kHz. The sensitivity and resolution were evaluated by experiments. We succeeded in oscillating the rod and detecting the contact.
| Original language | English |
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| Pages | 378-383 |
| Number of pages | 6 |
| Publication status | Published - Jan 1 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger Duration: Jan 25 1998 → Jan 29 1998 |
Other
| Other | Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems |
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| City | Heidelberg, Ger |
| Period | 1/25/98 → 1/29/98 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering