Rotary-linear piezoelectric microactuator with a cubic stator of side length 3.5 mm

Tomoaki Mashimo, Shigeki Toyama

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)


We report a miniature rotary-linear piezoelectric actuator with a single cubic stator of side length 3.5 mm which can generate rotary motion around the center axis and linear motion in the axial direction. The stator is fabricated as a single metallic cube of side length 3.5 mm with a 2.5-mm diameter through-hole and four piezoelectric elements bonded to the sides of the stator. The simplicity makes the actuator compact without any special manufacturing. In the design for miniaturization, the modal analysis using the finite element method indicates the natural frequency of the stator from the side length 14 mm to 3.5 mm. In the experiments, rotary motion of 24 rad/s and 2.5 μNm were obtained at a resonant frequency of 280 kHz, and linear motion of 80 mm/s and 2.6 mN was observed at 305 kHz by driving the system at an applied voltage of 42 Vrms.

Original languageEnglish
Article number5529471
Pages (from-to)1825-1830
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number8
Publication statusPublished - Aug 2010
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Rotary-linear piezoelectric microactuator with a cubic stator of side length 3.5 mm'. Together they form a unique fingerprint.

Cite this