Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

Florian Formanek; Nobuyuki Takeyasu; Takuo Tanaka; Kenta Chiyoda; Atsushi Ishikawa; Satoshi Kawata

doi:10.1063/1.2178261

Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

Florian Formanek, Nobuyuki Takeyasu, Takuo Tanaka, Kenta Chiyoda, Atsushi Ishikawa, Satoshi Kawata

Research output: Contribution to journal › Article › peer-review

93 Citations (Scopus)

Abstract

We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.

Original language	English
Article number	083110
Journal	Applied Physics Letters
Volume	88
Issue number	8
DOIs	https://doi.org/10.1063/1.2178261
Publication status	Published - 2006
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2178261

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@article{6921e4f352e4496486504e6f83d8ea98,

title = "Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures",

abstract = "We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.",

author = "Florian Formanek and Nobuyuki Takeyasu and Takuo Tanaka and Kenta Chiyoda and Atsushi Ishikawa and Satoshi Kawata",

note = "Funding Information: One of the authors (F.F.) was supported by a postdoctoral fellowship from the Japan Society for the Promotion of Science (JSPS).",

year = "2006",

doi = "10.1063/1.2178261",

language = "English",

volume = "88",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "8",

}

TY - JOUR

T1 - Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

AU - Formanek, Florian

AU - Takeyasu, Nobuyuki

AU - Tanaka, Takuo

AU - Chiyoda, Kenta

AU - Ishikawa, Atsushi

AU - Kawata, Satoshi

N1 - Funding Information: One of the authors (F.F.) was supported by a postdoctoral fellowship from the Japan Society for the Promotion of Science (JSPS).

PY - 2006

Y1 - 2006

N2 - We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.

AB - We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.

UR - http://www.scopus.com/inward/record.url?scp=33644521273&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33644521273&partnerID=8YFLogxK

U2 - 10.1063/1.2178261

DO - 10.1063/1.2178261

M3 - Article

AN - SCOPUS:33644521273

SN - 0003-6951

VL - 88

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 8

M1 - 083110

ER -

Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

Abstract

ASJC Scopus subject areas

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