Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Takefumi Kanda; Minoru K. Kurosawa; Toshiro Higuchi

doi:10.1016/S0041-624X(02)00091-4

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Takefumi Kanda, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10^-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

Original language	English
Pages (from-to)	61-65
Number of pages	5
Journal	Ultrasonics
Volume	40
Issue number	1-8
DOIs	https://doi.org/10.1016/S0041-624X(02)00091-4
Publication status	Published - May 2002
Externally published	Yes

Keywords

Hydrothermal method
PZT thin film
Surface profile measurement
Touch probe sensor

ASJC Scopus subject areas

Acoustics and Ultrasonics

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10.1016/S0041-624X(02)00091-4

Cite this

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title = "Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator",

abstract = "In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.",

keywords = "Hydrothermal method, PZT thin film, Surface profile measurement, Touch probe sensor",

author = "Takefumi Kanda and Kurosawa, {Minoru K.} and Toshiro Higuchi",

note = "Funding Information: This work was supported by the Grant-in-aid for general scientific research of the Ministry of Education, Culture, Sports, Science and Technology, and by the Proposal-Based New Industry Creative Type Technology R & D Promotion Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and by the Grant-in-aid for Research Fellowship for Young Scientists of the Japan Society for the Promotion of Science. ",

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doi = "10.1016/S0041-624X(02)00091-4",

language = "English",

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pages = "61--65",

journal = "Ultrasonics",

issn = "0041-624X",

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T1 - Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

AU - Kanda, Takefumi

AU - Kurosawa, Minoru K.

AU - Higuchi, Toshiro

N1 - Funding Information: This work was supported by the Grant-in-aid for general scientific research of the Ministry of Education, Culture, Sports, Science and Technology, and by the Proposal-Based New Industry Creative Type Technology R & D Promotion Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and by the Grant-in-aid for Research Fellowship for Young Scientists of the Japan Society for the Promotion of Science.

PY - 2002/5

Y1 - 2002/5

N2 - In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

AB - In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 × 10-1 mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity.

KW - Hydrothermal method

KW - PZT thin film

KW - Surface profile measurement

KW - Touch probe sensor

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JO - Ultrasonics

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ER -

Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Abstract

Keywords

ASJC Scopus subject areas

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