Small size pneumatic valve for smooth flow control using PZT vibrator

Daisuke Hirooka, Tomomi Yamaguchi, Naomichi Furushiro, Koichi Suzumori, Takefumi Kanda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


Pneumatic actuators have the potential to be downsized because they have simple structure. However, many control devices that can control pneumatic actuators continuously have large volume and weight. We have designed a flow-control valve driven by PZT vibrator. This control valve has small volume and low weight, and it can control air flow smoothly. This valve is suited to control small pneumatic actuators. The flow control valve that we propose uses resonance vibration with a PZT vibrator. The valve consists of an orifice plate, a PZT vibrator and iron particles that work as the poppet. From experimental flow quantity evaluation, this control valve controls air flow smoothly with low hysteresis at a large flow rate. In addition, this flow control valve achieves a maximum flow rate of 65 L/min under air pressure of 0.70 MPa. The results show that the valve has high controllability and can control a relatively large flow rate compared to its weight and size.

Original languageEnglish
Title of host publication2015 IEEE International Ultrasonics Symposium, IUS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479981823
Publication statusPublished - Nov 13 2015
EventIEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China
Duration: Oct 21 2015Oct 24 2015

Publication series

Name2015 IEEE International Ultrasonics Symposium, IUS 2015


OtherIEEE International Ultrasonics Symposium, IUS 2015
Country/TerritoryTaiwan, Province of China


  • PZT
  • flow control valve
  • pneumatic actuator
  • pneumatic valve

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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