Abstract
We applied deep-level transient spectroscopy (DLTS) under uniaxial stress to study the structure and bonding nature of a hydrogen-carbon (H-C) complex in Si. The application of 〈111〉 and 〈110〉 compressive stresses split the DLTS peak into two as ratios of 1:3 and 2:2, respectively, which were the ratios of the low-temperature peak to the high-temperature peak. No splitting was observed under the 〈100〉 stress. These results indicate the trigonal symmetry of the H-C complex and the anti-bonding nature of its electronic state. We observed a stress-induced alignment of the complex at 250K for 50 min under a 〈110〉 stress of 1 GPa.
Original language | English |
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Pages (from-to) | L1419-L1421 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 36 |
Issue number | 11 PART A |
DOIs | |
Publication status | Published - Nov 1 1997 |
Keywords
- Carbon
- DLTS
- Defect
- Hydrogen
- Si
- Stress-induced alignment
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)