Superfinishing Mechanism of Sintered Silicon Nitride

Toshikatsu Nakajima, Kazuhito Ohashi, Tomonori Takemoto

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


In this paper, superfinishing mechanism of sintered silicon nitride (SSN) is experimentally investigated, analyzing superfinishing force, surface roughness, stock removal, finished surface and so on. Work surface is ground before superfinishing. Cutting ability influenced by superfinishing conditions is quantitatively evaluated by means of obtaining the equivalent depth of removal considering an oscillation locus of stone on work surface. Main conclusions obtained in this study are as follows : (1) In superfinishing process of SSN with metal bond diamond stone, equivalent depth of removal is decided by pressure of a grain and ratio of surface contact. (2) Finished surface roughness decreases with an increase of work speed but is hardly influenced by stone pressure. (3) Equivalent depth of removal is hardly influenced by superfinishing conditions which take part in an oscillation locus of stone on work surface, and increases with an increase of stone pressure in addition to a decrease of ratio of surface contact.

Original languageEnglish
Pages (from-to)1483-1488
Number of pages6
JournalJournal of the Japan Society for Precision Engineering
Issue number9
Publication statusPublished - 1993
Externally publishedYes


  • cutting ability
  • equivalent depth of removal
  • metal bond diamond stone
  • ratio of surface contact
  • sintered silicon nitride
  • superfinishing mechanism
  • surface roughness

ASJC Scopus subject areas

  • Mechanical Engineering


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