Suppression of isolation table's fluctuation due to switching of feedforward controller

Habiburahman Shirani; Yukinori Nakamura; Shinji Wakui

doi:10.1299/jamdsm.5.295

Suppression of isolation table's fluctuation due to switching of feedforward controller

Habiburahman Shirani, Yukinori Nakamura, Shinji Wakui

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order to suppress the fluctuation of the table caused by switching, this study uses a difference operator before the feedforward compensator and the combination of feedforward and feedback loops. The effectiveness of this method is experimentally demonstrated.

Original language	English
Pages (from-to)	295-301
Number of pages	7
Journal	Journal of Advanced Mechanical Design, Systems and Manufacturing
Volume	5
Issue number	4
DOIs	https://doi.org/10.1299/jamdsm.5.295
Publication status	Published - 2011
Externally published	Yes

Keywords

Feedforward Compensator
Flow Disturbance
Pneumatic Isolation Table
Supplied Air
Switching
Voice Coil Motor

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/jamdsm.5.295

Cite this

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abstract = "To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order to suppress the fluctuation of the table caused by switching, this study uses a difference operator before the feedforward compensator and the combination of feedforward and feedback loops. The effectiveness of this method is experimentally demonstrated.",

keywords = "Feedforward Compensator, Flow Disturbance, Pneumatic Isolation Table, Supplied Air, Switching, Voice Coil Motor",

author = "Habiburahman Shirani and Yukinori Nakamura and Shinji Wakui",

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language = "English",

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AU - Shirani, Habiburahman

AU - Nakamura, Yukinori

AU - Wakui, Shinji

PY - 2011

Y1 - 2011

N2 - To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order to suppress the fluctuation of the table caused by switching, this study uses a difference operator before the feedforward compensator and the combination of feedforward and feedback loops. The effectiveness of this method is experimentally demonstrated.

AB - To avoid a longer settling time of an isolation table, switching of the feedforward controller which is used for the control of supplied air's disturbances, is needed after starting and prior to stopping the table. However, this switching also causes the fluctuation of the table. In order to suppress the fluctuation of the table caused by switching, this study uses a difference operator before the feedforward compensator and the combination of feedforward and feedback loops. The effectiveness of this method is experimentally demonstrated.

KW - Feedforward Compensator

KW - Flow Disturbance

KW - Pneumatic Isolation Table

KW - Supplied Air

KW - Switching

KW - Voice Coil Motor

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Suppression of isolation table's fluctuation due to switching of feedforward controller

Abstract

Keywords

ASJC Scopus subject areas

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