Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

Hiroshi Tsuji; Yoshitaka Toyota; Syoji Nagumo; Yasuhito Gotoh; Junzo Ishikawa; Shigeki Sakai; Masayasu Taniyo; Kohji Matsuda

doi:10.3131/jvsj.37.139

Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

Hiroshi Tsuji, Yoshitaka Toyota, Syoji Nagumo, Yasuhito Gotoh, Junzo Ishikawa, Shigeki Sakai, Masayasu Taniyo, Kohji Matsuda

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	139-142
Number of pages	4
Journal	Shinku
Volume	37
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.37.139
Publication status	Published - 1994
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.3131/jvsj.37.139

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title = "Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation",

author = "Hiroshi Tsuji and Yoshitaka Toyota and Syoji Nagumo and Yasuhito Gotoh and Junzo Ishikawa and Shigeki Sakai and Masayasu Taniyo and Kohji Matsuda",

year = "1994",

doi = "10.3131/jvsj.37.139",

language = "English",

volume = "37",

pages = "139--142",

journal = "Shinku",

issn = "0559-8516",

number = "3",

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TY - JOUR

T1 - Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

AU - Tsuji, Hiroshi

AU - Toyota, Yoshitaka

AU - Nagumo, Syoji

AU - Gotoh, Yasuhito

AU - Ishikawa, Junzo

AU - Sakai, Shigeki

AU - Taniyo, Masayasu

AU - Matsuda, Kohji

PY - 1994

Y1 - 1994

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U2 - 10.3131/jvsj.37.139

DO - 10.3131/jvsj.37.139

M3 - Article

AN - SCOPUS:85008285256

SN - 0559-8516

VL - 37

SP - 139

EP - 142

JO - Shinku

JF - Shinku

IS - 3

ER -

Surface Potential Measurement of the Insulator with Secondary Electron Caused by Negative Ion Implantation

ASJC Scopus subject areas

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