Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Y. Hayashi; T. Tokunaga; Y. Yogata; S. Toh; K. Kaneko; T. Soga; T. Jimbo

doi:10.1016/j.diamond.2004.01.020

Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Y. Hayashi, T. Tokunaga, Y. Yogata, S. Toh, K. Kaneko, T. Soga, T. Jimbo

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO₂/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH₄ and H₂ gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.

Original language	English
Pages (from-to)	1198-1202
Number of pages	5
Journal	Diamond and Related Materials
Volume	13
Issue number	4-8
DOIs	https://doi.org/10.1016/j.diamond.2004.01.020
Publication status	Published - Apr 2004
Externally published	Yes

Keywords

Bias-enhanced microwave plasma chemical vapor deposition
Corn-shape carbon nanofibers
High-resolution transmission electron microscopy
Nanotubes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2004.01.020

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@article{66ff74d8ee264a468e79f13d02d23de6,

title = "Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition",

abstract = "A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO2/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH4 and H2 gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.",

keywords = "Bias-enhanced microwave plasma chemical vapor deposition, Corn-shape carbon nanofibers, High-resolution transmission electron microscopy, Nanotubes",

author = "Y. Hayashi and T. Tokunaga and Y. Yogata and S. Toh and K. Kaneko and T. Soga and T. Jimbo",

note = "Funding Information: This work was partly supported by {\textquoteleft}Nanotechnology Support Project{\textquoteright} of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, carried out at Research Laboratory of High Voltage Electron Microscopy at Kyushu University.",

year = "2004",

month = apr,

doi = "10.1016/j.diamond.2004.01.020",

language = "English",

volume = "13",

pages = "1198--1202",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

number = "4-8",

}

TY - JOUR

T1 - Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

AU - Hayashi, Y.

AU - Tokunaga, T.

AU - Yogata, Y.

AU - Toh, S.

AU - Kaneko, K.

AU - Soga, T.

AU - Jimbo, T.

N1 - Funding Information: This work was partly supported by ‘Nanotechnology Support Project’ of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, carried out at Research Laboratory of High Voltage Electron Microscopy at Kyushu University.

PY - 2004/4

Y1 - 2004/4

N2 - A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO2/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH4 and H2 gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.

AB - A new type of corn-shape carbon nanofibers (CCNFs) with metal-free tips was fabricated and their characteristics were investigated. The CCNFs were grown on Ni/SiO2/Si and Ni/Mo mesh substrates by a microwave plasma-enhanced chemical-vapor deposition method using CH4 and H2 gases with the technique of bias enhanced growth method. Transmission electron microscopy and selected area electron diffraction show that CCNFs were composed of thick cylindrical pure graphite walls, and had nanometer-sized tips with roots. The tips' apex angles of CCNFs were dependent on the substrate temperature, as the cone angles of 20, 39 and 60°.

KW - Bias-enhanced microwave plasma chemical vapor deposition

KW - Corn-shape carbon nanofibers

KW - High-resolution transmission electron microscopy

KW - Nanotubes

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UR - http://www.scopus.com/inward/citedby.url?scp=2442587505&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2004.01.020

DO - 10.1016/j.diamond.2004.01.020

M3 - Article

AN - SCOPUS:2442587505

SN - 0925-9635

VL - 13

SP - 1198

EP - 1202

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 4-8

ER -

Synthesis of corn-shape carbon nanofibers on Si and Mo substrates by bias-enhanced microwave plasma chemical vapor deposition

Abstract

Keywords

ASJC Scopus subject areas

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