Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method

K. Nakaso, B. Han, K. H. Ahn, M. Choi, K. Okuyama

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90 Citations (Scopus)


Non-agglomerated spherical silicon, titanium and zirconium oxide nanoparticles were prepared using an electrospray assisted chemical vapor deposition (ES-CVD) process. Metal alkoxides in conjunction with an electrospray method were used to introduce charged precursors into a CVD reactor. The ions are produced during evaporation of the charged droplets, and they probably act as seed nuclei (i.e., ion-induced nucleation) and/or, they are attached to the produced particles. The experimental results were compared with those obtained using a conventional evaporation CVD method. The particles generated using the conventional evaporation method were agglomerated to a considerable extent irregardless of the type of particle. Whereas, at the same conditions, high concentrations of non-agglomerated nanoparticles having diameters in the range of 10-40 nm were obtained using the ES-CVD method. This appears to be due to the charging effects of the generated particles, that is, the electrostatic dispersion of unipolarly charged particles. The size of the non-agglomerated particles in the ES-CVD method was reduced as the results of the decease in the concentration of precursors introduced by electrospray.

Original languageEnglish
Pages (from-to)869-881
Number of pages13
JournalJournal of Aerosol Science
Issue number7
Publication statusPublished - Jul 1 2003
Externally publishedYes


  • Chemical vapor deposition (CVD)
  • Electrospray
  • Nanoparticle
  • Non-agglomerated particles
  • Particle charging

ASJC Scopus subject areas

  • Environmental Engineering
  • Pollution
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Atmospheric Science


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