Synthesis of TiN thin film on diamond surface for ferrous metal contacts by a new atom beam method

Hiroshi Kinoshita, Shunsuke Yamamoto, Hideaki Yatani, Tetsuo Nakai, Nobuo Ohmae

Research output: Contribution to journalArticlepeer-review


In order to prevent degradation of diamond surfaces in contact with ferrous metals, a TiN thin film of a few tens of nm thick was synthesized on a diamond surface with a Ti thin buffer layer of approximately 10 nm by a new atom beam method. A diamond surface was simultaneously exposed to pulsed Ti arc plasma and hyperthermal neutral N atom beam generated from an arc plasma gun (APG) and a laser breakdown-type atom beam generator, respectively. Frictional experiment of the TiN thin film was conducted by an in situ scanning electron microscopic (SEM) tribometer using a 1 mm diameter SUS304 pin with an applied force of 0.24 N. The TiN film had a relative high friction coefficient (0.4), but this film showed no notable degradation and relative steady friction. In addition, a TiN coated diamond tip by the new atom beam method showed less wear than that of non-coated diamond tips by three times in the scratching tests of iron with using an atomic force microscope (AFM).

Original languageEnglish
Pages (from-to)3002-3006
Number of pages5
JournalApplied Surface Science
Issue number7
Publication statusPublished - Jan 15 2012


  • Arc plasma deposition
  • Diamond surface degradation
  • Hyperthermal atom beam
  • TiN

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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