Abstract
Touch probe sensors, a rod-shaped and a flat-type, have been fabricated. These sensors use longitudinal vibration of PZT thin film transducer. The later has been improved by miniaturizing and using flat configuration. The characteristic was evaluated by experiments.
| Original language | English |
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| Pages | 481-484 |
| Number of pages | 4 |
| Publication status | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn Duration: Oct 5 1998 → Oct 8 1998 |
Other
| Other | Proceedings of the 1998 International Ultrasonics Symposium |
|---|---|
| City | Sendai, Miyagi, Jpn |
| Period | 10/5/98 → 10/8/98 |
ASJC Scopus subject areas
- Engineering(all)