Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

Haruyuki Sakurai; Natsuki Nemoto; Kuniaki Konishi; Yuki Sakurai; Nobuhiko Katayama; Tomotake Matsumura; Junji Yumoto; Makoto Kuwata-Gonokami

Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, Makoto Kuwata-Gonokami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

Original language	English
Title of host publication	2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781943580422
Publication status	Published - Aug 6 2018
Externally published	Yes
Event	2018 Conference on Lasers and Electro-Optics, CLEO 2018 - San Jose, United States Duration: May 13 2018 → May 18 2018

Publication series

Name	2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings

Other

Other	2018 Conference on Lasers and Electro-Optics, CLEO 2018
Country/Territory	United States
City	San Jose
Period	5/13/18 → 5/18/18

ASJC Scopus subject areas

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

Sakurai, H., Nemoto, N., Konishi, K., Sakurai, Y., Katayama, N., Matsumura, T., Yumoto, J., & Kuwata-Gonokami, M. (2018). Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. In 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings Article 8427334 (2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings). Institute of Electrical and Electronics Engineers Inc..

Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. / Sakurai, Haruyuki; Nemoto, Natsuki; Konishi, Kuniaki et al.
2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2018. 8427334 (2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sakurai, H, Nemoto, N, Konishi, K, Sakurai, Y, Katayama, N, Matsumura, T, Yumoto, J & Kuwata-Gonokami, M 2018, Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. in 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings., 8427334, 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2018 Conference on Lasers and Electro-Optics, CLEO 2018, San Jose, United States, 5/13/18.

Sakurai H, Nemoto N, Konishi K, Sakurai Y, Katayama N, Matsumura T et al. Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. In 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2018. 8427334. (2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings).

@inproceedings{e2da6326d8cd421c867901caf58be807,

title = "Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection",

abstract = "We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.",

author = "Haruyuki Sakurai and Natsuki Nemoto and Kuniaki Konishi and Yuki Sakurai and Nobuhiko Katayama and Tomotake Matsumura and Junji Yumoto and Makoto Kuwata-Gonokami",

note = "Publisher Copyright: {\textcopyright} 2018 OSA.; 2018 Conference on Lasers and Electro-Optics, CLEO 2018 ; Conference date: 13-05-2018 Through 18-05-2018",

year = "2018",

month = aug,

day = "6",

language = "English",

isbn = "9781943580422",

series = "2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings",

}

TY - GEN

T1 - Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

AU - Sakurai, Haruyuki

AU - Nemoto, Natsuki

AU - Konishi, Kuniaki

AU - Sakurai, Yuki

AU - Katayama, Nobuhiko

AU - Matsumura, Tomotake

AU - Yumoto, Junji

AU - Kuwata-Gonokami, Makoto

PY - 2018/8/6

Y1 - 2018/8/6

N2 - We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

AB - We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

UR - http://www.scopus.com/inward/record.url?scp=85052599988&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85052599988&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85052599988

SN - 9781943580422

T3 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings

BT - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018

Y2 - 13 May 2018 through 18 May 2018

ER -

Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

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