Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

Haruyuki Sakurai; Natsuki Nemoto; Kuniaki Konishi; Yuki Sakurai; Nobuhiko Katayama; Tomotake Matsumura; Junji Yumoto; Makoto Kuwata-Gonokami

doi:10.1364/CLEO_AT.2018.JW2A.77

Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, Makoto Kuwata-Gonokami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricate moth-eye anti-reflection structures for the terahertz region on highresistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Applications and Technology, CLEO_AT 2018
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/CLEO_AT.2018.JW2A.77
Publication status	Published - 2018
Externally published	Yes
Event	CLEO: Applications and Technology, CLEO_AT 2018 - San Jose, United States Duration: May 13 2018 → May 18 2018

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F92-CLEO_AT 2018

Other

Other	CLEO: Applications and Technology, CLEO_AT 2018
Country/Territory	United States
City	San Jose
Period	5/13/18 → 5/18/18

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Access to Document

10.1364/CLEO_AT.2018.JW2A.77

Cite this

Sakurai, H., Nemoto, N., Konishi, K., Sakurai, Y., Katayama, N., Matsumura, T., Yumoto, J., & Kuwata-Gonokami, M. (2018). Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. In CLEO: Applications and Technology, CLEO_AT 2018 (Optics InfoBase Conference Papers; Vol. Part F92-CLEO_AT 2018). OSA - The Optical Society. https://doi.org/10.1364/CLEO_AT.2018.JW2A.77

Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. / Sakurai, Haruyuki; Nemoto, Natsuki; Konishi, Kuniaki et al.
CLEO: Applications and Technology, CLEO_AT 2018. OSA - The Optical Society, 2018. (Optics InfoBase Conference Papers; Vol. Part F92-CLEO_AT 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sakurai, H, Nemoto, N, Konishi, K, Sakurai, Y, Katayama, N, Matsumura, T, Yumoto, J & Kuwata-Gonokami, M 2018, Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection. in CLEO: Applications and Technology, CLEO_AT 2018. Optics InfoBase Conference Papers, vol. Part F92-CLEO_AT 2018, OSA - The Optical Society, CLEO: Applications and Technology, CLEO_AT 2018, San Jose, United States, 5/13/18. https://doi.org/10.1364/CLEO_AT.2018.JW2A.77

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abstract = "We fabricate moth-eye anti-reflection structures for the terahertz region on highresistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.",

author = "Haruyuki Sakurai and Natsuki Nemoto and Kuniaki Konishi and Yuki Sakurai and Nobuhiko Katayama and Tomotake Matsumura and Junji Yumoto and Makoto Kuwata-Gonokami",

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AU - Katayama, Nobuhiko

AU - Matsumura, Tomotake

AU - Yumoto, Junji

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AB - We fabricate moth-eye anti-reflection structures for the terahertz region on highresistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.

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Y2 - 13 May 2018 through 18 May 2018

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Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection

Abstract

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Other

ASJC Scopus subject areas

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