Vibration velocity limitation of transducer using hydrothermal PZT film

Yutaka Kobayashi; Minoru Kuribayashi Kurosawa; Takefumi Kanda; Toshiro Higuchi

Vibration velocity limitation of transducer using hydrothermal PZT film

Yutaka Kobayashi, Minoru Kuribayashi Kurosawa, Takefumi Kanda, Toshiro Higuchi

Research output: Contribution to journal › Conference article › peer-review

Abstract

High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear.

Original language	English
Pages (from-to)	1047-1050
Number of pages	4
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	2
Publication status	Published - Dec 1 2001
Externally published	Yes
Event	2001 Ultrasonics Symposium - Atlanta, GA, United States Duration: Oct 6 2001 → Oct 10 2001

ASJC Scopus subject areas

Acoustics and Ultrasonics

Cite this

@article{ff391ce36ba34cb4b199d97fb769f5a3,

title = "Vibration velocity limitation of transducer using hydrothermal PZT film",

abstract = "High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear.",

author = "Yutaka Kobayashi and {Kuribayashi Kurosawa}, Minoru and Takefumi Kanda and Toshiro Higuchi",

year = "2001",

month = dec,

day = "1",

language = "English",

volume = "2",

pages = "1047--1050",

journal = "Proceedings of the IEEE Ultrasonics Symposium",

issn = "1051-0117",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2001 Ultrasonics Symposium ; Conference date: 06-10-2001 Through 10-10-2001",

}

TY - JOUR

T1 - Vibration velocity limitation of transducer using hydrothermal PZT film

AU - Kobayashi, Yutaka

AU - Kuribayashi Kurosawa, Minoru

AU - Kanda, Takefumi

AU - Higuchi, Toshiro

PY - 2001/12/1

Y1 - 2001/12/1

N2 - High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear.

AB - High intensity vibration operation of a PZT thin film longitudinal vibrator fabricated with a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.54 m/s. This value was almost 3 times larger than that of bulk PZT material. At such high intensity vibration level of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear.

UR - http://www.scopus.com/inward/record.url?scp=0035732580&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035732580&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0035732580

SN - 1051-0117

VL - 2

SP - 1047

EP - 1050

JO - Proceedings of the IEEE Ultrasonics Symposium

JF - Proceedings of the IEEE Ultrasonics Symposium

T2 - 2001 Ultrasonics Symposium

Y2 - 6 October 2001 through 10 October 2001

ER -

Vibration velocity limitation of transducer using hydrothermal PZT film

Abstract

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this