| Original language | English |
|---|---|
| Pages (from-to) | 13-20 |
| Number of pages | 8 |
| Journal | Memoirs of the Faculty of Engineering, Okayama University |
| Volume | 28 |
| Issue number | 2 |
| Publication status | Published - 1994 |
X-Ray Topographic Observation of Strain Generated by Thin Film (TiN) on Silicon Surface
Research output: Contribution to journal › Article