| Original language | Japanese |
|---|---|
| Pages (from-to) | 461-466 |
| Number of pages | 6 |
| Journal | 電気学会論文誌Ｅ センサ・マイクロマシン準部門誌 |
| Volume | Vol.125 |
| Issue number | No.12 |
| Publication status | Published - 2005 |
電磁アクチュエータ一体型マイクロリニアポンプ
Research output: Contribution to journal › Article
Research output: Contribution to journal › Article
| Original language | Japanese |
|---|---|
| Pages (from-to) | 461-466 |
| Number of pages | 6 |
| Journal | 電気学会論文誌Ｅ センサ・マイクロマシン準部門誌 |
| Volume | Vol.125 |
| Issue number | No.12 |
| Publication status | Published - 2005 |