TY - JOUR
T1 - A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer
AU - Kanda, Takefumi
AU - Makino, Akira
AU - Ono, Tomohisa
AU - Suzumori, Koichi
AU - Morita, Takeshi
AU - Kurosawa, Minoru Kuribayashi
N1 - Funding Information:
This work was supported by the Mazda Foundation, and by the Cooperation of Innovative Technology and Advanced Research in Evolutional Area (CITY AREA) of the Ministry of Education, Culture, Sports, Science and Technology.
PY - 2006/2/28
Y1 - 2006/2/28
N2 - In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
AB - In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
KW - Bulk piezoelectric material
KW - Micro machining
KW - Micro motor
KW - Piezoelectric actuator
KW - Ultrasonic motor
UR - https://www.scopus.com/pages/publications/32844458406
UR - https://www.scopus.com/pages/publications/32844458406#tab=citedBy
U2 - 10.1016/j.sna.2005.10.056
DO - 10.1016/j.sna.2005.10.056
M3 - Article
AN - SCOPUS:32844458406
SN - 0924-4247
VL - 127
SP - 131
EP - 138
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 1
ER -