@inproceedings{2d12773cd0484c9ab257f9ce9e9e3327,
title = "Application of cavitation aided machining to micro patterning of glass",
author = "Kazuhito Ohashi and Shinya Tsukamoto and Masaya Taguchi and Koichi Matsuoka",
year = "2005",
month = dec,
day = "1",
language = "English",
isbn = "1887706399",
series = "Proceedings of the 20th Annual ASPE Meeting, ASPE 2005",
booktitle = "Proceedings of the 20th Annual ASPE Meeting, ASPE 2005",
note = "20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005 ; Conference date: 09-10-2005 Through 14-10-2005",
}