Effects of back electromotive force in an absolute displacement sensor and improvement using current-feedback-type driver

Takashi Kai, Masaya Akiyama, Yukinori Nakamura, Shinji Wakui

研究成果

2 被引用数 (Scopus)

抄録

An absolute displacement sensor, which can simultaneously detect acceleration, velocity, and displacement signals, has been proposed for vibration control of semiconductor manufacturing equipments. Based on state feedback, a control model of the sensor is previously designed in order to calculate the feedback gains using optimal regulator. However, characteristics in simulations have been different from experiments in low frequency region. This difference is due to modeling of a driver circuit. In this paper, a voltage-feedback-type driver is replaced by a current-feedback-type driver in actual circuits of the sensor. The latter driver can ignore the effect of back electromotive force from a forcer coil. After the driver and the force are remodeled, simulation parameters are identified. As a result, the simulations are corresponding to the experiments.

本文言語English
ホスト出版物のタイトル2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
ページ373-378
ページ数6
出版ステータスPublished - 2011
外部発表はい
イベント2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Zhengzhou
継続期間: 8月 11 20118月 13 2011

出版物シリーズ

名前2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program

Other

Other2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
国/地域China
CityZhengzhou
Period8/11/118/13/11

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学

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