Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi; Yasuhiro Okamoto; Shin Ichi Nakashiba; Tomokazu Sakagawa; Akira Okada; Yoshiyuki Uno

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

Naoya Takahashi, Yasuhiro Okamoto, Shin Ichi Nakashiba, Tomokazu Sakagawa, Akira Okada, Yoshiyuki Uno

研究成果 › 査読

抄録

The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

本文言語	English
出版ステータス	Published - 12月 1 2011
イベント	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 - Omiya Sonic City, Saitama 継続期間: 11月 8 2011 → 11月 10 2011

Other

Other	6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011
国/地域	Japan
City	Omiya Sonic City, Saitama
Period	11/8/11 → 11/10/11

ASJC Scopus subject areas

産業および生産工学

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引用スタイル

@conference{44bb843390684dfb96c1b9bbaa7a2f6f,

title = "Effects of laser wavelength and intensity distribution on removal characteristics of TCO film",

abstract = "The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.",

keywords = "Intensity distribution, Laser, Scribing, TCO film, Wavelength",

author = "Naoya Takahashi and Yasuhiro Okamoto and Nakashiba, {Shin Ichi} and Tomokazu Sakagawa and Akira Okada and Yoshiyuki Uno",

year = "2011",

month = dec,

day = "1",

language = "English",

note = "6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011 ; Conference date: 08-11-2011 Through 10-11-2011",

}

TY - CONF

T1 - Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

AU - Takahashi, Naoya

AU - Okamoto, Yasuhiro

AU - Nakashiba, Shin Ichi

AU - Sakagawa, Tomokazu

AU - Okada, Akira

AU - Uno, Yoshiyuki

PY - 2011/12/1

Y1 - 2011/12/1

N2 - The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

AB - The effects of laser wavelength and intensity distribution on the removal characteristics of TCO films were experimentally investigated. The top-hat laser beam required the higher pulse energy rather than Gaussian laser beam to perform an acceptable scribed groove. The region of laser fluence to obtain an acceptable groove became wider in the case of top-hat laser beam compared with Gaussian laser beam, and the longer wavelength would lead to the wider acceptable fluence region. The burr height at the edge of groove could be reduced by the top-hat laser beam and the shorter laser wavelength.

KW - Intensity distribution

KW - Laser

KW - Scribing

KW - TCO film

KW - Wavelength

UR - http://www.scopus.com/inward/record.url?scp=84883439543&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883439543&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883439543

T2 - 6th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2011

Y2 - 8 November 2011 through 10 November 2011

ER -

Effects of laser wavelength and intensity distribution on removal characteristics of TCO film

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Other

ASJC Scopus subject areas

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