Measurement of micro-wave dielectric properties of SrTiO₃ substrate thin plates using planar electrodes

In this study, the possibility of accurate estimation of dielectric properties of ceramic thin plates was investigated. Thin plates were prepared from a SrTiO₃ single crystal, and micro-planar electrodes were formed on to the plates using electron beam lithography. Electromagnetic analysis software was used to design the electrode structure and evaluate the dielectric properties. Two electrode structures, LC resonance patterns and interdigital patterns, were employed for the measurements. The dielectric constants of the plates as determined with the two electrode structures were in good agreement with literature (ε_r = 310) [1].