TY - JOUR
T1 - Observation of plasma behavior in micro-machining of ceramics by harmonics of Nd:YAG laser
AU - Hayashi, Norihiro
AU - Okamoto, Yasuhiro
AU - Uno, Yoshiyuki
AU - Sakagawa, Tomokazu
PY - 2010
Y1 - 2010
N2 - Precision micro-machining without cracks and with a narrow heat affected zone is highly required for the effective use of high-performance material. For this purpose, it is expected that the higher harmonics of Nd:YAG laser could perform the precision micro-machining by its high photon energy. However, even using harmonics of Nd:YAG laser, the heat affected zone is inevitable due to the plasma generation. In order to reduce the influence of plasma, it is important to understand the generation mechanism of plasma. Therefore, the laser induced plasma was observed by the high-speed shutter camera, and the influence of laser wavelength on machining characteristics was investigated.
AB - Precision micro-machining without cracks and with a narrow heat affected zone is highly required for the effective use of high-performance material. For this purpose, it is expected that the higher harmonics of Nd:YAG laser could perform the precision micro-machining by its high photon energy. However, even using harmonics of Nd:YAG laser, the heat affected zone is inevitable due to the plasma generation. In order to reduce the influence of plasma, it is important to understand the generation mechanism of plasma. Therefore, the laser induced plasma was observed by the high-speed shutter camera, and the influence of laser wavelength on machining characteristics was investigated.
KW - Harmonics of Nd:YAG laser
KW - High-speed observation
KW - Micro-boring
KW - Plasma
KW - Removal depth
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U2 - 10.1299/jamdsm.4.867
DO - 10.1299/jamdsm.4.867
M3 - Article
AN - SCOPUS:80051930345
SN - 1881-3054
VL - 4
SP - 867
EP - 874
JO - Journal of Advanced Mechanical Design, Systems and Manufacturing
JF - Journal of Advanced Mechanical Design, Systems and Manufacturing
IS - 5
ER -