TY - JOUR
T1 - Performance of hydrothermal PZT film on high intensity operation
AU - Kanda, Takefumi
AU - Kurosawa, Minoru Kuribayashi
AU - Yasui, Hidehiko
AU - Higuchi, Toshiro
N1 - Funding Information:
This work was supported by a grant-in-aid for general scientific research from the Ministry of Education, Science, Sports and Culture of Japan, and by the Proposal-Based New Industry Creative Type Technology R&D Promotion Program from the New Energy and Industrial Technology Development Organization (NEDO) of Japan, and by a grant-in-aid for Research Fellowship for Young Scientists of the Japan Society for the Promotion of Science.
PY - 2001/3/20
Y1 - 2001/3/20
N2 - The deposition processes of PZT thin films have been described in many reports, yet there have been no descriptions of the performance of PZT films at high intensity operation. Hydrothermally-deposited PZT film transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT film expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using films formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the film was 38 μm and the driving voltage was 145 Vp-p. This velocity value was much larger than bulk PZT materials for high power applications.
AB - The deposition processes of PZT thin films have been described in many reports, yet there have been no descriptions of the performance of PZT films at high intensity operation. Hydrothermally-deposited PZT film transducers were examined at large vibration amplitude levels at resonance frequencies. It was demonstrated that the hydrothermal PZT film expresses superior performance with regard to linearity and maximum vibration velocity. The linearity of frequency responses at around the resonance frequency was excellent and superior to bulk material up to high intensity operation. The characteristics of longitudinal transducers using films formed under two deposition processes were tested. The maximum vibration velocity was 2.24 m/s when the thickness of the film was 38 μm and the driving voltage was 145 Vp-p. This velocity value was much larger than bulk PZT materials for high power applications.
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U2 - 10.1016/S0924-4247(00)00530-6
DO - 10.1016/S0924-4247(00)00530-6
M3 - Article
AN - SCOPUS:0035280917
SN - 0924-4247
VL - 89
SP - 16
EP - 21
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 1-2
ER -