TY - GEN
T1 - Position control of a vacuum gate valve and its evaluation
AU - Imai, Yusuke
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2012/11/27
Y1 - 2012/11/27
N2 - This paper considers the positioning of a motor in a vacuum gate valve which is used in a vacuum chamber. First, by using reinforcement of bearings' stiffness with permanent magnets, the fluctuation of the valve is suppressed. Next, by adjusting command signals and MR sensor's outputs, the repeatability of the positioning is improved. Moreover, three-dimensional dynamic analysis of the motor is performed by using magnetic analysis software "MagNet7." Simulation results agree with experimental results. Finally, sequential operation of the valve is performed without mechanical contact in atmosphere and vacuum.
AB - This paper considers the positioning of a motor in a vacuum gate valve which is used in a vacuum chamber. First, by using reinforcement of bearings' stiffness with permanent magnets, the fluctuation of the valve is suppressed. Next, by adjusting command signals and MR sensor's outputs, the repeatability of the positioning is improved. Moreover, three-dimensional dynamic analysis of the motor is performed by using magnetic analysis software "MagNet7." Simulation results agree with experimental results. Finally, sequential operation of the valve is performed without mechanical contact in atmosphere and vacuum.
UR - http://www.scopus.com/inward/record.url?scp=84869816032&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869816032&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84869816032
SN - 9780955529382
T3 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
SP - 229
EP - 234
BT - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
T2 - 2012 International Conference onAdvanced Mechatronic Systems, ICAMechS 2012
Y2 - 18 September 2012 through 21 September 2012
ER -