Temperature control and packaging optimization of the integrated hydrogen sensor

Kousuke Tsubota, Toshihiko Kiwa, Hironobu Yamada, Tomiharu Yamaguchi, Yohei Kondo, Hirofumi Imajo, Tsutomu Hondo, Tunetoshi Maehara, Tadayoshi Yamamoto, Keiji Tsukada


3 被引用数 (Scopus)


An integrated sensor chip combining a heater for temperature control and a diode for temperature monitoring was fabricated and its characteristics evaluated. Furthermore, a new packaging structure with a gas permeable film and sensor chip attached to the glass to improve the heat efficiency were developed. Using this packaging structure, the optimum working conditions and protection for the sensor chip were realized. The features of the diode were suffïcient to verify the sensor temperature. In terms of the value of heat efficiency per power consumption, we succeeded in advancing its values by about 15% compared to the glassless type. Furthermore, the time response curves for the sensor temperature and power consumption of the heater were measured. The thermal control System consists of a heater and the diode was successfully utilized to maintain the intended temperature. The heat efficiency was improved by attaching a glass and this System was found to be useful for the PPG-FET type hydrogen sensor.

ジャーナルIEEJ Transactions on Sensors and Micromachines
出版ステータスPublished - 2009

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学


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