TY - GEN
T1 - Ultrashort pulsed-laser fabrication of silicon moth-eye structures for terahertz anti-reflection
AU - Sakurai, Haruyuki
AU - Nemoto, Natsuki
AU - Konishi, Kuniaki
AU - Sakurai, Yuki
AU - Katayama, Nobuhiko
AU - Matsumura, Tomotake
AU - Yumoto, Junji
AU - Kuwata-Gonokami, Makoto
N1 - Publisher Copyright:
© 2018 OSA.
PY - 2018/8/6
Y1 - 2018/8/6
N2 - We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.
AB - We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.
UR - http://www.scopus.com/inward/record.url?scp=85052599988&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85052599988&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85052599988
SN - 9781943580422
T3 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
BT - 2018 Conference on Lasers and Electro-Optics, CLEO 2018 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 Conference on Lasers and Electro-Optics, CLEO 2018
Y2 - 13 May 2018 through 18 May 2018
ER -